PWM32 Microprocessor Sequence Controller
The model PWM32 Spin Controller has been upgraded and new product is now called model PWM50. We buy used equipment and factory re-furbish it at times, so the PWM32 may linger in our terminology and sales material for a considerable time. References to the PWM32 will be updated as soon as practical.
See the special page explaining the main differences in the two models.
Programming instructions for the PWM32 Controller

- PWM32 Microprocessor Sequence Controller
- Up to 9 steps in one recipe
- Memory for up to 10 user designed recipes
- User defined & set in each step: rpm, ramp (accel/decel), time, various I/O for accessory control (dispensers, exhaust control, lid/doors, etc.
- Speed can be manually adjusted while a recipe is running
- Operator can manually turn on the vacuum to the chuck, overriding AUTO control
- LCD interface for user input prompting and process display
- RS485 port for future communication and add-on equipment use
- An optional Tabletop Mounting Stand (pictured below) is available for the controller. This stand permits the controller to sit on a tabletop surface, inclined upward toward the operator. Alternately, it may be mounted to suspend the controller underneath a tabletop, inclined upward toward the operator.
- The basic controller can control simple dispensers, at minimal cost, for additional dispenser hardware. Controller I/O allows output of 2 fluids.
- The PWM32 controller can directly replace many older SCR type controllers (EC101 and PM101) for improved PWM performance, as well as the other new features. A trade-in credit will be given on applicable EC/PM101 spinners or controllers. Typically, dispensers used on EC/PM101 spinners will not work with the PWM32 controller. It may be possible, at the factory, to adapt such dispensers; or, to use applicable parts in building a compatible dispenser.
Backside View of PWM32  | Optional Tabletop Mounting Stand Part Number 2-22621.  |
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PWM32 Controller Spinner Family
PWM32 Controlled spinner systems are available in four Motor/Bowl configurations listed below. Each spinner system is manufactured to HRI's standard specifications. The following information will assist in selecting the most efficient components for your needs.
The PWM32 Spinners are offered in Four Standard Motor/Bowl Configurations:
- Model PWM32-PS-R790, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to 5-inch maximum
- Model PWM32-PS-CB15, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to a recommended 8-inch maximum
- Model PWM32-BD-CB15, up to 2,500 rpm for heavy loads such as compact disk masters, thick E-beam masks, LCD panels, substrates requiring high inertia chucks, etc. and substrates up to a recommended 12-inch maximum
- Model PWM32-BD-LS22, the next larger bowl for substrates larger than 12-inches, or for heavy substrates at higher than 2,500 rpm or consider the IT22 (a different family of 22-inch I.D. Spinners).
All PWM32 Spinners Feature:
- World-wide line voltage input: 115/220 vac 50/60Hz models
- Pulse Width Modulated (PWM) motor drive
- The PWM32 controller drives various DC servo motors with closed loop feedback
- Headway EC and PM motors (on earlier SCR spinners)
- Headway PS motor (EC101DT spinners)
- The high powered BD motor, to 2,500 rpm for heavy loads
- Almost certainly others, not yet tested
- Safety Features
- Failsafe interlocked vacuum to the chuck. Vacuum is applied by de-energizing the control valve. If power fails during a process, the vacuum remains applied. Cycle can not start without chuck vacuum and will abort if vacuum is lost while running.
- Zero speed sensor: Keeps vacuum fully applied to the chuck until the motor stops. Can also be used to lock doors, lids, etc., during operation, or prevent the accessory substrate lifter from working during spinner operation.
- Abort circuit permits manual operator or system automatic abort.
- Inhibit start circuit allows various optional accessories to prevent the start of a new cycle until an undesired condition is corrected. For instance, if a sensor on a waste container senses a "near full" condition, or if a sensor in the exhaust tube senses an out-of-tolerance exhaust condition, the sensor can inhibit the beginning of a new cycle without aborting the current cycle in progress.
PWM202 Sequence Controller
with PWM Motor Driver for Headway's Heavy Duty Spinners
This model was developed specifically for R&D applications when relatively large and/or heavy substrates need to be processed by spinning, but in a simple sequence, at the lowest possible cost. 
The PWM202 controller can drive either one of two motors to its full 1/2 horsepower capability. The BD2 motor will spin twice the inertial load of the BD5 motor up to 2,500 rpm. The top speed of the BD5 motor is 5,000 rpm. The BD2 has been used to spin an inertial load as large as a 14" diameter aluminum plate, 3/8" thick. Both motors are dc servo motors with a vacuum-thru-the-shaft design for vacuum chucks and potentially a substrate lifter, working through the motor shaft.
The acceleration/deceleration ramp is adjustable over a range of approximately 0.5 to 4.0 seconds from zero to max speed. The three sequence timers can be set to one of two ranges: 0.1 to 99.9 or 1 to 999 seconds or minutes or hours! The sequence is: Timer 1 at Speed 1, then Timer 2 at speed 2, then Timer 3 at Speed 3. A +24 vdc output from each timer is available externally, for actuating dispense functions or other peripheral devices during the active time of that timer.
The PWM202 system is typically built into the LS22 or IT22 style of cabinet (22" I.D. bowls), although the BD motors can be used on the smaller CB15 style bowl (15" I.D.) in special situations.
The PWM202 can control simple 1 and 2 fluid type accessory dispensers. If more complex sequences or more complex dispensing features are needed, then the microprocessor MP100 controller, is recommended. The MP100 utilizes the same PWM motor driver as the PWM202, but the MP100 can control long sequences of events, control more I/O for complex functions such as moving arms and complex dispensing functions, save recipes for future re-use, etc. (at a slightly higher price).
MP100 Controller
The MP100 controller is designed with many special features and capabilities. The operator interface panel makes it easy to interact with the operator and provides on time information to the operator. The engineer can design and debug a program in a minimal period of time. The unit is designed to be flush mounted in a panel. The front panel is a sealed unit consisting of a 4 X 20 character display and 4 X 4 tactile feedback keyboard. 
The 4 X 20 character display utilizes Super Twist high contrast LCD technology and LED backlight to provide high reliability and increased viewing angle for superior readability in all light conditions. Both the character contrast and the LED backlight intensity are adjustable via potentiometers.
The 4 X 4 keyboard is clearly identified and each key has a raised perimeter, providing tactile feedback and ensuring positive response.
The MP100 can be used as either an intelligent Operator Interface to communicate via RS232 to many devices such as PLC's, Motor Controllers, etc. or with the use of the real world I/O's it can control many types of industrial equipment. An example of a real-world application is the IT22 Developer.
Features:
- All programming codes are stored in a 32K EEPROM
- All programming data are stored in 32K battery backed up RAM.
- All digital outputs can be configured to either SPDT relays capable of delivering 4A @120VAC or high current line drivers capable of delivering 200 MA @48VDC.
- All digital inputs are optically isolated and jumper selected to ±5VDC, ±24VDC, 120VAC, or sink inputs.
- Analog inputs accept a range of voltage inputs from 0 to +5VDC and 0 to ±10VDC with 8 bits resolution.
- Analog outputs give you voltage output from 0 to +10VDC with 12 bits resolution.
- Full duplex RS232 port.
- Programming is done, on an IBM PC or 100% compatible, with the use of our "EASY C"? compiler.
- Optional Real time clock and calendar
PWM32程序控制器
- 单个程序可以设置9个步骤的操作;
- 可以记忆10个用户的设置程序;
- 用户可选择设置单位:rpm, ramp (accel/decel), time, various I/O for accessory control (dispensers, exhaust control, lid/doors, etc.
- 运行过程中可以手动修改速度;
- 操作者若不用自动控制时,可以手动打开真空吸盘;
- LCD界面显示操作和运行过程;
- RS485端口可以连接附加设备;
- 可选配件为桌面固定夹,可以将控制器的方向固定到方便使用者的位置。
- 基本控制器可以为更多的悬液喷雾机做控制。控制器I / O允许2种流体的输出。
PWM32控制器已经升级为PWM50,具体升级如下:
1.软件进行了改进,以消除在校准过程中,因电源关闭(重开)造成的
问题。现在,升级版PWM50,在没有完成校准过程的情况下关闭电源,只会取消校准程序,不需全部程序从头开始。
2.系统已经重新设计成允许可选的(在购买时)多加8个输出端口(加上之前3个)。在安装的时候,这需要额外的硬件,一个I / O板,额外的线束和接头。
3.PWM50中的“PS”电机被更换为新设计的“DY”电机。库存的“PS”电机将作为更换部件直接售卖。
4. PWM50可为1-9的操作程序菜单设置密码,保护设置的菜单。0号操作程序菜单保持开放,没有密码,任何人可使用。