规格参数
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尺寸 | 420 mm X 540 mm X 535 mm (16.5” X 21.3” X 21.1”) (W,H,L) – with Optics
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重量 | 32 kg (70 lbs.)
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基座 | Solid Aluminum rigid base on rubber vibration isolation feet
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卡盘平台X-Y 移动
| Adjustable magnetic slide for coarse adjustment (> 150 mm) Fine micrometer adjustment – 25 mm (X, Y) Entire stage easily removed via magnetic base |
卡盘平台Z 移动
| Z travel: 20 mm (0.78”) with micrometer driven contact/separation
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Theta 移动
| Travel: 360 degrees (coarse) and 10 degrees (fine) with theta locking knob
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卡盘 | Vacuum or mechanical clamping, round or square, HF, ambient, thermal and custom Handle die, waffle packs, sawn wafers on frame, broken wafers and wafers up to 150 mm Nickel plated steel with concentric vacuum rings (standard), other materials available |
台板
| Aluminum with stainless steel top and removable front wedge for easy wafer handling Manipulator fixation – magnetic (standard), vacuum (with optional vacuum manifolds) |
台板移动
| Micrometer driven platen Z adjustment
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显微镜安装
| Rigid aluminum post (standard) or boom available
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显微镜移动
| Manual coaxial and linear fine microscope movement - 50 mm (X) and 75 mm (Y) (2”x3”)
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光学组件
| Trinocular stereo zoom microscope (standard), compound or zoom tube (optional)
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其它工具
| Power: AC 110/220V AC 50-60 Hz 20A Vacuum: 23 Hg or -0.8 bar |
可选配件
| CCTV Systems (camera, monitor and adapter) and stand (shown in picture page 1) Manipulators, Probe Arms, Probes, Cables – Coaxial, Triaxial, Kelvin, HF, Optical Probe Card and Package Part Holders Vibration Isolation Tables, Dark Box Stages – wafer, packaged part, thermal |