规格参数：
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| 尺寸 | 1200 mm X 550 mm X 900 mm (47.3” X 21.6” X 35.4”) (W,H, L) – with optics
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| 重量 | 250 Kg (550 lbs.) - Vibration Isolation (table and frame) |
| 卡盘平台 X-Y 移动 | Several stages to select from to meet performance and budget requirements Travel: 305 mm x 305 mm Planarity: +/- 10 μm over travel range
Resolution: 5 μm
Independent X and Y linear movement
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| 卡盘平台Z 移动 | Z Travel: 10 mm Z Contact/Separation Stroke: 4 mm adjustable |
| Theta移动 | Travel: 360 degrees
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| 卡盘 | Vacuum or mechanical clamping, round or square, ambient, thermal and custom Handle die, waffle packs, sawn wafers on frame, broken wafers and full wafers up to 300 mm Nickel plated steel with concentric vacuum rings (standard), other plating materials available
Planarity: 15 μm
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| 压盘 | Aluminum with stainless steel top 360 degree manipulator placement Manipulator fixation – magnetic, vacuum |
| 压盘移动 | Platen Lift: Choice of fixed or adjustable Adjustable: Coarse - 25 mm, Fine – 6 mm |
| 显微镜装置/移动 | Mounting – Boom, Post or Bridge Movement – Manual or Programmable – 50 x 50 mm, 50 x 75 mm, 100 x 100 mm |
| 光学组件 | Stereo Zoom, Zoom Tube, A-Zoom or Compound Microscope
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| 其它工具 | Power: AC 110/220V AC 50-60 Hz 20A Vacuum: 23 Hg or -0.8 bar |