产品介绍
Gemini Multi-Chamber Stripper
The Gemini is the most compact, inexpensive and versatile system, which can handle 100-300mm wafers. This multi-chamber, high throughput stripping system is designed specifically for the demands of today's production fabs. By employing ICP, microwave and RF bias power as needed, difficult to remove layers of resist can be removed at low temperatures. As required by application, this system can incorporate the SST-Lightning microwave source (which is both reliable and free from typical microwave tuning problems) or ICP technology.
.Etch rates up to 6um/min
.100mm to 300mm wafers
.High throughput
.Small footprint
.Low plasma damage
.Competitively priced
.Self-tuning
Applications
MEMS, Compound Semiconductor, Advanced Packaging.
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