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产品介绍

Measurement Capability 

Non-contact, three-dimensional, surface roughness, critical dimension, film thickness, tribology

Objectives 

Super long working distance objectives: 2X, 5X, 10X, with crash mitigation assembly;
Standard working distance objectives: 1.5X, 2.5X, 5X, 10X, 20X, 50X, 100X;
Optional through transmissive media objective kits; 
Optional four-position turret

Field of View Multipliers 

0.55X, 0.75X, 1X, 1.5X, 2X;
Auto-sensing motorized selector, discreet zoom

Measurement Array 

Maximum array 640 × 480, high-speed, non-interlaced

Light Source  Long-lifetime green and white LEDs

Measurable Sample Dim. 

H = 350mm (249mm with automated stage); D = 304mm; W = 304mm

Stage Weight Load Capacity 

Up to 50kg (110lbs)

Air Table Weight Load Capacity  90kg (200lbs)

Optical Assembly 

Integrated computer-controlled illuminator;
  Closed-loop precision vertical scanner
 

Computer System  Latest Dell
® PC w/flat panel monitor, mounted on Ergotron® mobile workstation;
  Production mode, built-in databasing with pass/fail for any parameter;
  Optional HDVSI, MATLAB®/TCPIP, Film Analysis, Optical Analysis and SureVision

Vertical Resolution1
  <0.15nm
RMS Repeatability2
  0.03nm

Step Height  0.5% accuracy;
  <0.12% at 1σ repeatability

Lateral Spatial Sampling   0.1 to 13.2µm
Optical Resolution3
  0.49µm min.

Field-of-View  7.68 × 5.76mm max, 0.06 × 0.05mm min.
 

Footprint  172cm H x 77cm D x 81cm W (67.6in. H x 30.4in. D x 32in. W)
 

Certification  CE, NRTL, T-Mark, ROHS compliant, ANSI B46.1 compliant

具体详情请联系veeco 中国 产品供应商 铂悦仪器上海有限公司

联系电话：021-51863668

联系人：钱先生

联系手机：13918209012