清洗机与客户自备真空泵的适用性
Harrick plasma units require a vacuum pump with a minimum pump speed of at least 1.4 m3/hour (23 L/min) and that can reach an ultimate total pressure of 200 mTorr (0.27 mbar) or less.
Harrick 等离子清洗机需要最小抽气速度为1.4 m3/hour (23 L/min)，能达到的极限压力为200 mTorr (0.27 mbar)或小于该值。
The rear stem of the chamber is 0.5" (12.7mm) outer diameter (OD). It may be easier to use a 0.5" inner diameter vacuum hose and find a suitable adapter to attach to the pump inlet.
等离子清洗机的反应舱后部玻璃柄的外径为0.5" (12.7mm)。可能采用一个内径为0.5" (12.7mm)的真空管及适用的转换头与真空进气口连接更容易点。
本博客版权归 迈可诺等离子技术小组 所有，未经同意不得转载。
